(Reuters) - Intel ( INTC ) on Monday said that the first two cutting-edge machines from ASML Holding are "in production" at its factories, with early data indicating they are more reliable than the previous generation of machines.

At a conference in San Jose, California, Intel ( INTC ) senior principal engineer Steve Carson said Intel ( INTC ) has produced 30,000 wafers - the large discs of silicon that can yield thousands of computing chips - with ASML's high numerical aperture lithography machines.

Intel ( INTC ) last year was the world's first chipmaker to take delivery of the machines, which are expected to produce smaller and faster computing chips than earlier ASML machines.