09:44 AM EDT, 06/30/2025 (MT Newswires) -- Onto Innovation ( ONTO ) said Monday that it has agreed to acquire Semilab International's materials analysis business for $545 million in cash and shares.

The consideration consists of $475 million in cash and 706,215 common Onto Innovation ( ONTO ) shares, Onto said.

Onto said the acquisition will add four product lines for inline wafer contamination monitoring and materials interface characterization to its portfolio.

The company said it expects the deal to increase non-GAAP earnings per share by more than 10% in the first year, and generate more than $130 million in annual revenue.

The deal is slated to be completed in the second half of the year.

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